The triode sputter-ion pump operates by ionizing gas molecules in a magnetically confined cold-cathode discharge. The gas is ionized by electrons emitted from titanium cathodes. The positive gas ions hit the cathode surface and cause its sputtering. Titanium is sputtered on the inner surfaces of the pump.
1. |
Active gases react with sputtered titanium and form stable chemical compounds. |
2. |
Hydrogen is diffused into the cathode structure (besides being gettered). |
3. |
The ions of inert gases are neutralized by glancing collisions with the cathodes and then they are buried as high energetic neutrals (in the anode or pump walls) with sputtered titanium. |