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  TRIODE   SPUTTER  -  ION   PUMPS  

IPT 20
IPT 25
IPT 50
IPT 100
IPT 200
IPG 200

FEATURES
Triode sputter-ion pumps are suited for generating a heavy-hydrocarbon-free ultra-high-vacuum. They are superior to diode and noble sputter-ion pumps in pumping speed and long-term stability for inert gases. They are also able to start at higher pressures than diode and noble pumps.

The pumps allow the use of the pump current indication for pressure measurement or leak detection (oxygen can be used as the test gas).

The sputter-ion pumps can be combined with other accumulation pumps. VAKUUM PRAHA offers a combination of the sputter-ion pumps with NEG (non-evaporable getter).

PRINCIPLE OF OPERATION
The triode sputter-ion pump operates by ionizing gas molecules in a magnetically confined cold-cathode discharge. The gas is ionized by electrons emitted from titanium cathodes. The positive gas ions hit the cathode surface and cause its sputtering. Titanium is sputtered on the inner  surfaces of the pump.    

1.
Active gases react with sputtered titanium and form stable chemical compounds.
2.
Hydrogen is diffused into the cathode structure (besides being gettered).
3.
The ions of inert gases are neutralized by glancing collisions with the cathodes and then they are buried as high energetic neutrals (in the anode or pump walls) with sputtered titanium.
 
DESCRIPTION
The titanium strip cathodes and the stainless steel anode are placed in the vacuum tight envelope. The high voltage -6 kV is applied to the cathodes. The anode is grounded. The magnetic field is created by external ferrites bakeable up to
250 oC.

APPLICATION
- Laboratory UHV systems
- Electron device processing
- Molecular beam epitaxy
- Surface analysis
- Particle accelerator

IPT 20
IPT 25
IPT 50
IPT 100
IPT 200
IPG 200